Patent Assignment Details
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Reel/Frame: | 006396/0311 | |
| Pages: | 5 |
| | Recorded: | 01/19/1993 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/04/1995
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Application #:
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07979574
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Filing Dt:
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11/20/1992
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Title:
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HIGH DENSITY PLASMA DEPOSITION AND ETCHING APPARATUS
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Assignee
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9255 DEERING AVENUE |
CHATSWORTH, CALIFORNIA 91311 |
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Correspondence name and address
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ALAN H. MAC PHERSON
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SKJERVEN MORRILL MACPHERSON FRANKLIN
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AND FRIEL
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25 METRO DR., SUITE 700
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SAN JOSE, CA 95110
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