Patent Assignment Details
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| Reel/Frame: | 006410/0778 | |
| Pages: | 2 |
| | Recorded: | 01/21/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/11/1994
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Application #:
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08007163
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Filing Dt:
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01/21/1993
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Title:
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METHOD FOR SUPPLYING AND DISCHARGING GAS TO AND FROM SEMICONDUCTOR MANUFACTURING EQUIPMENT AND SYSTEM FOR EXECUTING THE SAME
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Assignee
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| 3-13, 2-CHOME, TORANOMON |
| MINATO-KU, TOKYO-TO, JAPAN |
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Correspondence name and address
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DAVID L. FEHRMAN
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GRAHAM & JAMES
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801 S. FIGUEROA STREET, 14TH FLOOR
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L.A., CA. 90017-5554
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