Patent Assignment Details
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Reel/Frame: | 006421/0553 | |
| Pages: | 2 |
| | Recorded: | 01/29/1993 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/04/1995
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Application #:
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08011353
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Filing Dt:
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01/29/1993
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Title:
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METHOD FOR DETECTING POSITIONS OF PHOTOMASK AND SUBSTRATE
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Assignee
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2-3, MARUNOUCHI 3-CHOME CHIYODA-KU |
TOKYO 100, JAPAN |
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Correspondence name and address
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NELSON H. SHAPIRO
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SHAPIRO AND SHAPIRO
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1100 WILSON BOULEVARD
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SUITE 1701
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ARLINGTON, VA 22209
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