Patent Assignment Details
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| Reel/Frame: | 006522/0421 | |
| Pages: | 2 |
| | Recorded: | 05/05/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/25/1994
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Application #:
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08004528
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Filing Dt:
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01/14/1993
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Title:
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METHOD FOR CLEANING REACTION CHAMBERS BY PLASMA ETCHING
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Assignee
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| WITTELSBACHERPLATZ 2 |
| MUNICH, GERMANY 8000 |
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Correspondence name and address
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HILL, STEADMAN & SIMPSON, P.C.
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JOHN D. SIMPSON
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85TH FLOOR SEARS TOWER
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233 S. WACKER DRIVE
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CHICAGO, ILLINOIS 60606
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