Patent Assignment Details
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| Reel/Frame: | 006625/0421 | |
| Pages: | 3 |
| | Recorded: | 06/17/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/27/1994
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Application #:
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08080165
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Filing Dt:
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06/17/1993
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Title:
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ELECTROSTATIC APPARATUS AND METHOD FOR REMOVING PARTICLES FROM SEMICONDUCTOR WAFERS
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Assignee
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| 1109 MCKAY DRIVE, MS/45 SAN JOSE, CA 95131 |
| SAN JOSE,, CALIFORNIA 95131 |
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Correspondence name and address
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VLSI TECHNOLOGY, INC.
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WILLIAM G. BECKER, ESQUIRE
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1109 MCKAY DRIVE MS-45
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SAN JOSE, CA 95131
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