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Patent Assignment Details
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Reel/Frame:006644/0660   Pages: 3
Recorded: 06/16/1993
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/09/1996
Application #:
08077687
Filing Dt:
06/16/1993
Title:
INTEGRATED MODULE MULTI-CHAMBER CVD PROCESSING SYSTEM AND ITS METHOD FOR PROCESSING SUBSTRATES
Assignors
1
Exec Dt:
06/14/1993
2
Exec Dt:
06/14/1993
3
Exec Dt:
06/14/1993
Assignee
1
81-YOTSUYA 5-CHOME, FUCHU-SHI
TOKYO 185, JAPAN
Correspondence name and address
PLATON N.MANDROS
BURNS, DOANE, SWECKER & MATHIS
THE GEORGE MASON BUILDING
WASHINGTON & PRINCE ST., P.O. BOX 1404
ALEXANDRIA, VA 22313-1404

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