Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 006648/0872 | |
| Pages: | 4 |
| | Recorded: | 07/28/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/13/1994
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Application #:
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08098164
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Filing Dt:
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07/28/1993
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Title:
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PLANARIZATION PROCESS FOR IC TRENCH ISOLATION USING OXIDIZED POLYSILICON FILLER
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Assignee
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| 146 MAIN STREET |
| MAYNARD, MASSACHUSETTS 01754 |
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Correspondence name and address
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ROBERT J. FELTOVIC
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PATENT LAW GROUP
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DIGITAL EQUIPMENT CORP., MS02-3/G3
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111 POWDERMILL ROAD
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MAYNARD, MA 01754
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