Patent Assignment Details
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| Reel/Frame: | 006649/0086 | |
| Pages: | 2 |
| | Recorded: | 07/29/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/29/1994
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Application #:
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08098875
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Filing Dt:
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07/29/1993
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Title:
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ELECTRON BEAM EXPOSURE METHOD AND SYSTEM FOR EXPOSING A PATTERN ON A SUBSTRATE WITH AN IMPROVED ACCURACY AND THROUGHPUT
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Assignee
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| 1015, KAMIKODANAKA, NAKAHARA-KU KAWASAKI-SHI |
| KANAGAWA 211, JAPAN |
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Correspondence name and address
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H.J. STAAS
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STAAS & HALSEY
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1825 K STREET, N.W., STE. 816
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WASHINGTON, DC 20006
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