Patent Assignment Details
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| Reel/Frame: | 006687/0272 | |
| Pages: | 3 |
| | Recorded: | 09/13/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/24/1994
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Application #:
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07918045
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Filing Dt:
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07/24/1992
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Title:
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PLASMA PROCESSING APPARATUS CAPABLE OF DETECTING AND REGULATING ACTUAL RF POWER AT ELECTRODE WITHIN CHAMBER
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Assignee
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| 2381-1 KITAGEJO, FUJII-MACHI |
| NIRASAKI-SHI, YAMANASHI 407, JAPAN |
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Correspondence name and address
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RICHARD NEIFELD, PH.D.
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OBLON, SPIVAK, MCCLELLAND, MAIER
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& NEUSTADT, P.C.
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1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR
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ARLINGTON, VA 22202
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