Patent Assignment Details
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Reel/Frame: | 006743/0290 | |
| Pages: | 3 |
| | Recorded: | 10/26/1993 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/24/1995
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Application #:
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08077602
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Filing Dt:
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06/17/1993
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Title:
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PLASMA PROCESSING APPARATUS ETCHING TUNNEL-TYPE
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Assignees
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2-3-1, NISHI-SHINJUKU, SHINJUKU-KU |
TOKYO, JAPAN |
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52 AZAMATSUNAGANE, IWAYADO, ESASHI-SHI |
IWATE-KEN, JAPAN |
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72 HORIKAWA-CHO, SAIWAI-KU |
KAWASAKI-SHI, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER
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& NEUSTADT, P.C. - ROBERT F. GNUSE
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1755 JEFFERSON DAVIS HWY., FOURTH FLOOR
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ARLINGTON, VIRGINIA 22202
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