Patent Assignment Details
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| Reel/Frame: | 006862/0536 | |
| Pages: | 2 |
| | Recorded: | 02/09/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08047449
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Filing Dt:
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04/15/1993
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Title:
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METHOD OF AND DEVICE FOR TRANSPORTING SEMICONDUCTOR SUBSTRATE IN SEMICONDUCTOR PROCESSING SYSTEM
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Assignee
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| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU |
| KYOTO, JAPAN |
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Correspondence name and address
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LOWE, PRICE, LEBLANC & BECKER
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MICHAEL S. GZYBOWSKI
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99 CANAL CENTER PLAZA, STE. 300
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ALEXANDRIA, VA 22314
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