Patent Assignment Details
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| Reel/Frame: | 007140/0420 | |
| Pages: | 3 |
| | Recorded: | 08/23/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/15/1996
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Application #:
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08294396
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Filing Dt:
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08/23/1994
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Title:
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METHOD AND DEVICE FOR DETECTING THE END POINT OF PLASMA PROCESS
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Assignees
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| 2-3-1, NISHI-SHINJUKU, SHINJUKU-KU, TOKYO |
| TOKYO, JAPAN |
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| 2381-1 KITAGEJO, FUJII-MACHI, NIRASAKI-SHI |
| YAMANASHI 407, JAPAN |
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Correspondence name and address
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MARVIN J. SPIVAK
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OBLON, SPIVAK, MCCLELLAND, MAIER ET AL.
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4TH, 1755 JEFFERSON DAVIS HWY.
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ARLINGTON, VA 22202
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