Patent Assignment Details
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| Reel/Frame: | 007168/0304 | |
| Pages: | 3 |
| | Recorded: | 07/25/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/13/1996
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Application #:
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08235012
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Filing Dt:
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04/28/1994
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Title:
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METHOD OF DETERMINING A DECHUCKING VOLTAGE WHICH NULLIFIES A RESIDUAL ELECTROSTATIC FORCE BETWEEN AN ELECTROSTATIC CHUCK AND A WAFER
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Assignee
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| 3050 BOWERS AVENUE, M/S #0934 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PETER SGARBOSSA
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APPLIED MATERIALS, INC.
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LEGAL AFFAIRS DEPT.
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3050 BOWERS AVE., M/S 0934
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SANTA CLARA, CA 95054
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