Patent Assignment Details
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| Reel/Frame: | 007180/0158 | |
| Pages: | 3 |
| | Recorded: | 09/30/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/08/1996
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Application #:
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08316302
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Filing Dt:
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09/30/1994
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Title:
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PECVD METHOD OF DEPOSITING FLUORINE DOPED OXIDE USING A FLUORINE PRECURSOR CONTAINING A GLASS-FORMING ELEMENT
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Assignee
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| 72, HORIKAWA-CHO SAIWAI-KU |
| KAWASAKI-SHI KANAGAWA-KEN, JAPAN |
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Correspondence name and address
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ERIC W. PETRASKE
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IBM CORPORATION
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INTELLECTUAL PROPERTY LAW DEPT.
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DEPT. 34H/BLDG. 300-482, 1580 ROUTE 52
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HOPEWELL JUNCTION, NY 12533-6531
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