Patent Assignment Details
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| Reel/Frame: | 007282/0077 | |
| Pages: | 3 |
| | Recorded: | 12/22/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/20/1996
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Application #:
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08361579
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Filing Dt:
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12/22/1994
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD
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Assignees
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 170, JAPAN |
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| 2381-1 KITAGEJO, FUJII-MACHI, NIRASAKI-SHI |
| YAMANASHI 407, JAPAN |
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Correspondence name and address
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MARVIN J. SPIVAK
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OBLON, SPIVAK, MCCLELLAND, MAIER ET AL.
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HWY.
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ARLINGTON, VA 22202
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