Patent Assignment Details
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Reel/Frame: | 007311/0264 | |
| Pages: | 2 |
| | Recorded: | 01/03/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/11/1997
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Application #:
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08367828
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Filing Dt:
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01/03/1995
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND ITS CLEANING METHOD
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Assignee
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1015, KAMIKODANAKA, NAKAHARA-KU |
KAWASAKI-SHI |
KANAGAWA 211, JAPAN |
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Correspondence name and address
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GEORGE E. ORAM, JR.
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NIKAIDO, MARMELSTEIN, MURRAY ET AL
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METROPOLITAN SQUARE, 655 15TH ST., N.W.
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G STREET LOBBY, SUITE 330
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WASHINGTON, D.C. 20005-5701
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