Patent Assignment Details
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Reel/Frame: | 007487/0845 | |
| Pages: | 3 |
| | Recorded: | 05/08/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/22/1997
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Application #:
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08435063
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Filing Dt:
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05/08/1995
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Title:
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HIGH DENSITY SELECTIVE SIO2:SI3N4 ETCHING USING A STOICHIOMETRICALLY ALTERED NITRIDE ETCH STOP
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Assignee
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OLD ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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Correspondence name and address
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WHITHAM, CURTIS, ET AL
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ATTN: C. LAMONT WHITHAM
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RESTON INTERNATIONAL CENTER
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11800 SUNRISE VALLEY DRIVE, SUITE 900
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RESTON, VA 22091
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