Patent Assignment Details
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| Reel/Frame: | 007516/0200 | |
| Pages: | 3 |
| | Recorded: | 04/10/1995 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/18/1997
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Application #:
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08389888
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Filing Dt:
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02/15/1995
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Title:
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AUTOMATIC FREQUENCY TUNING OF AN RF POWER SOURCE OF AN INDUCTIVELY COUPLED PLASMA REACTOR
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Assignee
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| 3050 BOWERS AVENUE, M/S #0934 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PETER J. SGARBOSSA
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APPLIED MATERIALS, INC.
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LEGAL AFFAIRS DEPT.
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3050 BOWERS AVE., M/S 2634
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SANTA CLARA, CA 95054
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