Patent Assignment Details
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| Reel/Frame: | 007531/0151 | |
| Pages: | 3 |
| | Recorded: | 05/22/1995 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/03/1996
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Application #:
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08446346
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Filing Dt:
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05/22/1995
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Title:
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ILLUMINATION OPTICAL SYSTEM, ALIGNMENT APPARATUS, AND PROJECTION EXPOSURE APPARATUS USING THE SAME
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO 100, JAPAN |
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Correspondence name and address
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PENNIE & EDMONDS
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CHARLES E. MILLER
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1155 AVENUE OF THE AMERICAS
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NEW YORK, NEW YORK 10036
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