Patent Assignment Details
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| Reel/Frame: | 007579/0466 | |
| Pages: | 2 |
| | Recorded: | 08/11/1995 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/21/1995
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Application #:
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08153157
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Filing Dt:
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11/17/1993
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Title:
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METHOD AND APPARATUS FOR ELECTRON BEAM LITHOGRAPHY
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Assignee
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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THOMAS E. BEALL, JR.
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FAY, SHARPE, BEALL, FAGAN, MINNICH
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& MCKEE - THOMAS E. BEALL, JR.
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104 EAST HUME AVENUE
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ALEXANDRIA, VIRGINIA 22301
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