Patent Assignment Details
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Reel/Frame: | 007672/0010 | |
| Pages: | 3 |
| | Recorded: | 09/18/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/21/1997
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Application #:
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08529872
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Filing Dt:
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09/18/1995
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Title:
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SPIN-ON-GLASS ETCHBACK PLANARIZATION PROCESS USING AN OXYGEN PLASMA TO REMOVE AN ETCHBACK POLYMER RESIDUE
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Assignee
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121, PARK AVE.3 SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN ROC |
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Correspondence name and address
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GEORGE O. SILE
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20 MCINTOSH DR.
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POUGHKEEPSIE, NY 12603
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