Patent Assignment Details
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Reel/Frame: | 007685/0301 | |
| Pages: | 2 |
| | Recorded: | 09/15/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/28/1997
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Application #:
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08528817
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Filing Dt:
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09/15/1995
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Title:
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APPARATUS FOR DETECTING POSITIONAL DEVIATION OF DIFFRACTION GRATINGS ON A SUBSTRATE BY UTILIZING OPTICAL HETERODYNE INTERFERENCE OF LIGHT BEAMS INCIDENT ON THE GRATINGS FROM FIRST AND SECOND LIGHT EMITTERS
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Assignee
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30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU |
TOKYO, JAPAN |
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Correspondence name and address
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STEVEN E. WARNER
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FITZPATRICK, CELLA, HARPER & SCINTO
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277 PARK AVENUE
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NEW YORK, NY 10172-0194
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