Patent Assignment Details
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Reel/Frame: | 007702/0848 | |
| Pages: | 3 |
| | Recorded: | 09/29/1995 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/13/1996
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Application #:
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08536478
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Filing Dt:
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09/29/1995
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Title:
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METHOD OF INSPECTING FIRST LAYER OVERLAY SHIFT IN GLOBAL ALIGNMENT PROCESS
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Assignee
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SCIENCE BASED INDUSTRIAL PARK |
121, PARK AVENUE 3 |
HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DR.
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POUGHKEEPSIE, NY 12603
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