Patent Assignment Details
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| Reel/Frame: | 007878/0501 | |
| Pages: | 3 |
| | Recorded: | 04/08/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08578427
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Filing Dt:
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12/26/1995
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Title:
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METHOD AND SYSTEM FOR EVALUATING DISTRIBUTION OF ABSORPTION LIGHT AMOUNT IN OPTICAL LITHOGRAPHY
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Assignee
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| 72 HORIKAWA-CHO, SAIWAI-KU, |
| KAWASAKI-SHI, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER,
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& NEUSTADT, P.C. ROBERT F. GNUSE
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VA 22202
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