Patent Assignment Details
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| Reel/Frame: | 007897/0041 | |
| Pages: | 2 |
| | Recorded: | 04/18/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/09/1999
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Application #:
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08588085
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Filing Dt:
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01/18/1996
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Title:
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TOP ANTIREFLECTIVE COATING MATERIAL AND ITS PROCESS FOR DUV AND VUV LITHOGRAPHY SYSTEMS
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Assignee
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| KAWASAKI-SHI |
| 72, HORIKAWA-CHO, SAIWAI-KU |
| KANAGAWA-KEN, JAPAN |
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Correspondence name and address
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BANNER & ALLEGRETTI, LTD.
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JOSEPH M. SKERPON
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1001 G STREET N.W.
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11TH FLOOR
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WASHINGTON, D.C. 20001-4597
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