Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 008020/0387 | |
| Pages: | 3 |
| | Recorded: | 04/24/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08636929
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Filing Dt:
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04/24/1996
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Title:
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LOW-TEMPERATURE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON OXIDE FILMS AND FLUORINATED SILICON OXIDE FILMS USING DISILANE AS A SILICON PRECURSOR
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Assignee
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| OFFICE OF TECHNOLOGY TRANSFER |
| 203 DAVID BOYD, LOUISIANA STATE UNIVERSITY |
| BATON ROUGE, LOUISIANA 70803 |
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Correspondence name and address
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TAYLOR, PORTER, BROOKS & PHILLIPS, LLP
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JOHN H. RUNNELS
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P.O. BOX 2471
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BATON ROUGE, LA 70821
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