Patent Assignment Details
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Reel/Frame: | 008053/0383 | |
| Pages: | 3 |
| | Recorded: | 06/19/1996 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/07/1998
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Application #:
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08666161
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Filing Dt:
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06/19/1996
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Title:
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ABATEMENT OF ELECTRON BEAM CHARGING DISTORTION DURING DIMENSIONAL MEASUREMENTS OF INTEGRATED CIRCUIT PATTERNS WITH SCANNING ELECTRON MICROSCOPY BY THE UTILIZATION OF SPECIALLY DESIGNED TEST STRUCTURES
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Assignee
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121, PARK AVE. 3, SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DR.
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POUGHKEEPSIE, NY 12603
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