Patent Assignment Details
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| Reel/Frame: | 008087/0023 | |
| Pages: | 2 |
| | Recorded: | 07/15/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08642172
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Filing Dt:
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03/29/1996
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Title:
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METHODS AND APPARATUSES FOR CONTROLLING PHASE DIFFERENCE IN PLASMA PROCESSING SYSTEMS
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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HICKMAN BEYER & WEAVER
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JOSEPH A. NGUYEN
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P. O. BOX 61059
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PALO ALTO, CA 94306
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