Patent Assignment Details
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| Reel/Frame: | 008087/0225 | |
| Pages: | 5 |
| | Recorded: | 08/06/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08689174
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Filing Dt:
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08/06/1996
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Title:
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LOW PRESSURE AND LOW POWER C12/HC1 PROCESS FOR SUB-MICRON METAL ETCHING
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Assignee
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| 10950 NORTH TANTAU AVENUE |
| CUPERTINO, CALIFORNIA 95014 |
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Correspondence name and address
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WHITHAM, CURTIS, WHITHAM ET AL.
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MICHAEL E. WHITHAM, ESQ.
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11800 SUNRISE VALLEY DRIVE
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SUITE 900
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RESTON, VA 20191
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