Patent Assignment Details
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| Reel/Frame: | 008114/0394 | |
| Pages: | 2 |
| | Recorded: | 09/04/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/07/1998
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Application #:
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08648541
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Filing Dt:
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05/16/1996
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Title:
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SEMICONDUCTOR FABRICATING APPARATUS, METHOD FOR CONTROLLING OXYGEN CONCENTRATION WITHIN LOAD-LOCK CHAMBER AND MEHTOD FOR GENERATING NATIVE OXIDE
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Assignee
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| 14-20, 3-CHOME, HIGASHI-NAKANO |
| NAKANO-KU, TOKYO 164, JAPAN |
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Correspondence name and address
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GRAHAM & JAMES
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DAVID L. FEHRMAN, ESQ.
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801 S. FIGUEROA ST., 14TH FLR.
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LOS ANGELES, CA 90017-5554
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