Patent Assignment Details
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| Reel/Frame: | 008117/0488 | |
| Pages: | 3 |
| | Recorded: | 06/12/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/01/1997
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Application #:
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08661897
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Filing Dt:
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06/12/1996
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Title:
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CHEMICAL-MECHANICAL POLISHING (CMP) METHOD FOR CONTROLLING POLISHING RATE USING IONIZED WATER, AND CMP APPARATUS
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Assignee
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARRABOW,
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GARRETT & DUNNER, L.L.P.
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MR. ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, D.C. 20005
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