Patent Assignment Details
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| Reel/Frame: | 008172/0329 | |
| Pages: | 2 |
| | Recorded: | 08/08/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/27/1999
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Application #:
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08694353
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Filing Dt:
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08/08/1996
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Title:
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METHOD AND APPARATUS FOR TREATING EXHAUST GASES FROM CVD, PECVD OR PLASMA ETCH REACTORS
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Assignee
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON ET AL.
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DAVID E. STEUBER
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25 METRO DRIVE, SUITE 700
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SAN JOSE, CALIFORNIA 95110
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