Patent Assignment Details
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| Reel/Frame: | 008191/0190 | |
| Pages: | 3 |
| | Recorded: | 09/11/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/03/1998
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Application #:
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08711935
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Filing Dt:
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09/11/1996
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Title:
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METHOD OF DETECTING A DEFICIENCY IN A CHARGED-PARTICLE-BEAM EXPOSURE MASK
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Assignee
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| 1-1, KAMIKODANAKA 4-CHOME NAKAHARA-KU, KAWASAKI-SHI |
| KANAGAWA 211, JAPAN |
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Correspondence name and address
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STAAS & HALSEY
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H. J. STAAS
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700 ELEVENTH STREET, N.W.
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SUITE 500
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WASHINGTON, D.C. 20001
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