Patent Assignment Details
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| Reel/Frame: | 008264/0830 | |
| Pages: | 3 |
| | Recorded: | 10/10/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/26/1999
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Application #:
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08729283
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Filing Dt:
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10/10/1996
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Title:
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SUBSTRATE CLEANING METHOD AND A SUBSTRATE CLEANING APPARATUS
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Assignee
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER &
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NEUSTADT, P.C.
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C. IRVIN MCCLELLAND
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1755 JEFFERSON DAVIS HWY., 4TH FLOOR
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ARLINGTON, VA 22202
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