Patent Assignment Details
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| Reel/Frame: | 008279/0185 | |
| Pages: | 3 |
| | Recorded: | 12/02/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/06/1999
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Application #:
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08720588
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Filing Dt:
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09/30/1996
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Title:
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AUTOMATIC FREQUENCY TUNING OF AN RF POWER SOURCE OF AN INDUCTIVELY COUPLED PLASA REACTOR
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Assignee
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| P.O. BOX 450A, LEGAL DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT M. WALLACE, LEGAL DEPARTMENT
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P.O. BOX 450A
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SANTA CLARA, CA 95062
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