Patent Assignment Details
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| Reel/Frame: | 008293/0363 | |
| Pages: | 3 |
| | Recorded: | 11/04/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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08743628
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Filing Dt:
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11/04/1996
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Title:
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METHOD AND APPARATUS FOR IMPROVING ACCURACY IN PHOTOLITHOGRAPHIC PROCESSING OF SUBSTRATES
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Assignee
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| P. O. BOX 450A, M/S #2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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MICHAEL B. EINSCHLAG
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PATENT COUNSEL, LEGAL AFFAIRS DEPT.
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P. O. BOX 450A, M/S 2061
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SANTA CLARA, CA 95052
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