Patent Assignment Details
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| Reel/Frame: | 008349/0170 | |
| Pages: | 3 |
| | Recorded: | 01/06/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/19/2001
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Application #:
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08724660
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Filing Dt:
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10/01/1996
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Title:
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METHOD AND APPARATUS FOR SIDEWALL PROFILE CONTROL DURING AN ETCH PROCESS
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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LAURIE J. MINTZ
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PATENT COUNSEL
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LEGAL AFFAIRS DEPT.
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P.O. BOX 450A
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SANTA CLARA, CA 95052
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