Patent Assignment Details
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| Reel/Frame: | 008460/0430 | |
| Pages: | 3 |
| | Recorded: | 03/11/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/25/1998
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Application #:
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08814211
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Filing Dt:
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03/11/1997
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Title:
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CORRECTION OF PATTERN DEPENDENT POSITION ERRORS IN ELECTRON BEAM LITHOGRAPHY
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Assignee
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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DELIO & PETERSON, LLC
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ERIC W. PETRASKE
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121 WHITNEY AVENUE
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NEW HAVEN, CT 06510-1241
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