Patent Assignment Details
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| Reel/Frame: | 008515/0690 | |
| Pages: | 3 |
| | Recorded: | 04/14/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/20/1999
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Application #:
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08835327
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Filing Dt:
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04/07/1997
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Title:
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PLANARIZATION OF SHALLOW TRENCH ISOLATION BY DIFFERENTIAL ETCHBACK AND CHEMICAL MECHANICAL POLISHING
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 9, CREATION RD. |
| HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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LADAS & PARRY
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RICHARD P. BERG
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5670 WILSHIRE BLVD.
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#2100
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LOS ANGELES, CA 90036
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