Patent Assignment Details
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| Reel/Frame: | 008534/0844 | |
| Pages: | 7 |
| | Recorded: | 02/07/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08707491
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Filing Dt:
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09/16/1996
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Title:
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DEPOSITION CHAMBER CLEANING TECHNIQUE USING A HIGH POWER REMOTE EXCITATION SOURCE
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Assignee
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| NO. 1, 7 BAN, 2-CHOME NISHISHINJUKU |
| TOKYO, JAPAN |
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Correspondence name and address
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FISH & RICHARDSON P.C.
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MARK D. WIECZOREK
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2200 SAND HILL ROAD, SUITE 100
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MENLO PARK, CA 94025
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