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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:008574/0422   Pages: 39
Recorded: 06/30/1997
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 46
1
Patent #:
4158717
Issue Dt:
Application #:
05768659
Filing Dt:
Title:
2
Patent #:
4313815
Issue Dt:
02/02/1982
Application #:
05894287
Filing Dt:
04/07/1978
Title:
SPUTTER-COATING SYSTEM, AND VACUUM VALVE, TRANSPORT, AND SPUTTER SOURCE ARRAY ARRANGEMENTS THEREFOR
3
Patent #:
4311427
Issue Dt:
01/19/1982
Application #:
06106342
Filing Dt:
12/21/1979
Title:
WAFER TRANSFER SYSTEM
4
Patent #:
4756815
Issue Dt:
07/12/1988
Application #:
06106343
Filing Dt:
12/21/1979
Title:
WAFER COATING SYSTEM
5
Patent #:
4392938
Issue Dt:
07/12/1983
Application #:
06320385
Filing Dt:
11/12/1981
Title:
RADIO FREQUENCY ETCH TABLE WITH BIASED EXTENSION MEMBER
6
Patent #:
4392932
Issue Dt:
07/12/1983
Application #:
06320386
Filing Dt:
11/12/1981
Title:
METHOD FOR OBTAINING UNIFORM ETCH BY MODULATING BIAS ON EXTENSION MEMBER AROUND RADIO FREQUENCY ETCH TABLE
7
Patent #:
4416759
Issue Dt:
11/22/1983
Application #:
06325588
Filing Dt:
11/27/1981
Title:
A SPUTTER SYSTEM INCORPORATING AN IMPROVED BLOCKING SHIELD CONTOURING THE THICKNESS OF SPUTTER COATED LAYERS
8
Patent #:
4416760
Issue Dt:
11/22/1983
Application #:
06325589
Filing Dt:
11/27/1981
Title:
APPARATUS FOR ASYMMETRICALLY CONTOURING THE THICKNESS OF SPUTTER COATED LAYERS
9
Patent #:
4444643
Issue Dt:
04/24/1984
Application #:
06504598
Filing Dt:
06/16/1983
Title:
PLANA MAGNETRON SPUTTERING DEVICE
10
Patent #:
4522845
Issue Dt:
06/11/1985
Application #:
06505678
Filing Dt:
06/20/1983
Title:
PROCESS FOR PRODUCING A LAYER OF A METAL SILICIDE BY APPLYING MULTICHROMATIC RADIATION
11
Patent #:
4436602
Issue Dt:
03/13/1984
Application #:
06524708
Filing Dt:
08/19/1983
Title:
BLOCKING SHIELD AND METHOD FOR CONTOURING THE THICKNESS OF SPUTTER COATED LAYERS
12
Patent #:
4500408
Issue Dt:
02/19/1985
Application #:
06564776
Filing Dt:
12/27/1983
Title:
APPARATUS FOR AND METHOD OF CONTROLLING SPUTTER COATING
13
Patent #:
4500409
Issue Dt:
02/19/1985
Application #:
06564777
Filing Dt:
12/27/1983
Title:
MAGNETRON SPUTTER COATING SOURCE FOR BOTH MAGNETIC AND NON MAGNETIC TARGET MATERIALS
14
Patent #:
4673480
Issue Dt:
06/16/1987
Application #:
06575111
Filing Dt:
01/30/1984
Title:
MAGNETICALLY ENHANCED SPUTTER SOURCE
15
Patent #:
4569746
Issue Dt:
02/11/1986
Application #:
06611434
Filing Dt:
05/17/1984
Title:
MAGNETRON SPUTTER DEVICE USING THE SAME POLE PIECE FOR COUPLING SEPARATE CONFINING MAGNETIC FIELDS TO SEPARATE TARGETS SUBJECT TO SEPARATE DISCHARGES
16
Patent #:
4548699
Issue Dt:
10/22/1985
Application #:
06611551
Filing Dt:
05/17/1984
Title:
TRANSFER PLATE ROTATION SYSTEM
17
Patent #:
4557819
Issue Dt:
12/10/1985
Application #:
06632783
Filing Dt:
07/20/1984
Title:
SYSTEM FOR IGNITING AND CONTROLLING A WAFER PROCESSING PLASMA
18
Patent #:
4552639
Issue Dt:
11/12/1985
Application #:
06712452
Filing Dt:
03/13/1985
Title:
MAGNETRON SPUTTER ETCHING SYSTEM
19
Patent #:
4629548
Issue Dt:
12/16/1986
Application #:
06719182
Filing Dt:
04/03/1985
Title:
PLANAR PENNING MAGNETRON SPUTTERING DEVICE
20
Patent #:
4632719
Issue Dt:
12/30/1986
Application #:
06777382
Filing Dt:
09/18/1985
Title:
SEMICONDUCTOR ETCHING APPARATUS WITH MAGNETIC ARRAY AND VERTICAL SHIELD
21
Patent #:
4709655
Issue Dt:
12/01/1987
Application #:
06805029
Filing Dt:
12/03/1985
Title:
CHEMICAL VAPOR DEPOSITION APPARATUS
22
Patent #:
4627904
Issue Dt:
12/09/1986
Application #:
06811595
Filing Dt:
12/19/1985
Title:
MAGNETRON SPUTTER DEVICE HAVING SEPARATE CONFINING MAGNETIC FIELDS TO SEPARATE TARGETS AND MAGNETICALLY ENHANCED R.F. BIAS
23
Patent #:
4761218
Issue Dt:
08/02/1988
Application #:
06848900
Filing Dt:
04/04/1986
Title:
SPUTTER COATING SOURCE HAVING PLURAL TARGET RINGS
24
Patent #:
4714536
Issue Dt:
12/22/1987
Application #:
07032916
Filing Dt:
03/31/1987
Title:
PLANAR MAGNETRON SPUTTERING DEVICE WITH COMBINED CIRCUMFERENTIAL AND RADIAL MOVEMENT OF MAGNETIC FIELDS
25
Patent #:
4865712
Issue Dt:
09/12/1989
Application #:
07080200
Filing Dt:
07/28/1987
Title:
APPARATUS AND METHOD FOR MANUFACTURING PLANARIZED ALUMINUM FILMS
26
Patent #:
4851101
Issue Dt:
07/25/1989
Application #:
07098572
Filing Dt:
09/18/1987
Title:
SPUTTER MODULE FOR MODULAR WAFER PROCESSING MACHINE
27
Patent #:
5002010
Issue Dt:
03/26/1991
Application #:
07423802
Filing Dt:
10/18/1989
Title:
VACUUM VESSEL
28
Patent #:
5281320
Issue Dt:
01/25/1994
Application #:
07680219
Filing Dt:
04/04/1991
Title:
WAFER COATING SYSTEM
29
Patent #:
5330628
Issue Dt:
07/19/1994
Application #:
07780882
Filing Dt:
10/23/1991
Title:
COLLIMATED DEPOSITION APPARATUS AND METHOD
30
Patent #:
6024843
Issue Dt:
02/15/2000
Application #:
07936865
Filing Dt:
08/27/1992
Title:
SPUTTERING APPARATUS WITH A ROTATING MAGNET ARRAY HAVING A GEOMETRY FOR SPECIFIED TARGET EROSION PROFILE
31
Patent #:
5417833
Issue Dt:
05/23/1995
Application #:
08047599
Filing Dt:
04/14/1993
Title:
SPUTTERING APPARATUS HAVING A ROTATING MAGNET ARRAY AND FIXED ELECTROMAGNETS
32
Patent #:
5478455
Issue Dt:
12/26/1995
Application #:
08123759
Filing Dt:
09/17/1993
Title:
METHOD FOR CONTROLLING A COLLIMATED SPUTTERING SOURCE
33
Patent #:
5482611
Issue Dt:
01/09/1996
Application #:
08133595
Filing Dt:
10/08/1993
Title:
PHYSICAL VAPOR DEPOSITION EMPLOYING ION EXTRACTION FROM A PLASMA
34
Patent #:
5635036
Issue Dt:
06/03/1997
Application #:
08134351
Filing Dt:
10/08/1993
Title:
COLLIMATED DEPOSITION APPARATUS AND METHOD
35
Patent #:
5513594
Issue Dt:
05/07/1996
Application #:
08140351
Filing Dt:
10/20/1993
Title:
CLAMP WITH WAFER RELEASE FOR SEMICONDUCTOR WAFER PROCESSING EQUIPMENT
36
Patent #:
5680502
Issue Dt:
10/21/1997
Application #:
08362026
Filing Dt:
04/03/1995
Title:
THIN FILM HEAT TREATMENT APPARATUS WITH CONDUCTIVELY HEATED TABLE AND SURROUNDING RADIATION SHIELD
37
Patent #:
5511608
Issue Dt:
04/30/1996
Application #:
08368567
Filing Dt:
01/04/1995
Title:
CLAMPLESS VACUUM HEAT TRANSFER STATION
38
Patent #:
5716485
Issue Dt:
02/10/1998
Application #:
08476966
Filing Dt:
06/07/1995
Title:
ELECTRODE DESIGNS FOR CONTROLLING UNIFORMITY PROFILES IN PLASMA PROCESSING REACTORS
39
Patent #:
5656123
Issue Dt:
08/12/1997
Application #:
08480369
Filing Dt:
06/07/1995
Title:
DUAL-FREQUENCY CAPACITIVELY-COUPLED PLASMA REACTOR FOR MATERIALS PROCESSING
40
Patent #:
5595784
Issue Dt:
01/21/1997
Application #:
08516790
Filing Dt:
08/18/1995
Title:
TITANIUM NITRIDE AND MULTILAYERS FORMED BY CHEMICAL VAPOR DEPOSITION OF TITANIUM HALIDES
41
Patent #:
5791895
Issue Dt:
08/11/1998
Application #:
08564256
Filing Dt:
06/10/1996
Title:
APPARATUS FOR THERMAL TREATMENT OF THIN FILM WAFER
42
Patent #:
5605866
Issue Dt:
02/25/1997
Application #:
08565355
Filing Dt:
11/30/1995
Title:
CLAMP WITH WAFER RELEASE FOR SEMICONDUCTOR WAFER PROCESSING EQUIPMENT
43
Patent #:
5702573
Issue Dt:
12/30/1997
Application #:
08592909
Filing Dt:
01/29/1996
Title:
METHOD AND APPARATUS FOR IMPROVED LOW PRESSURE COLLIMATED MAGNETRON SPUTTER DEPOSITION OF METAL FILMS
44
Patent #:
5741363
Issue Dt:
04/21/1998
Application #:
08621088
Filing Dt:
03/22/1996
Title:
INTERIORLY PARTITIONED VAPOR INJECTOR FOR DELIVERY OF SOURCE REAGENT VAPOR MIXTURES FOR CHEMICAL VAPOR DEPOSITION
45
Patent #:
6521106
Issue Dt:
02/18/2003
Application #:
08665639
Filing Dt:
06/18/1996
Title:
COLLIMATED DEPOSITION APPARATUS
46
Patent #:
5996528
Issue Dt:
12/07/1999
Application #:
08674444
Filing Dt:
07/02/1996
Title:
METHOD AND APPARATUS FOR FLOWING GASES INTO A MANIFOLD AT HIGH POTENTIAL
Assignor
1
VARIAN ASSOCIATES, INC.
Exec Dt:
05/07/1997
Assignee
1
NOVELLUS SYSTEMS, INC.
3970 NORTH FIRST STREET
SAN JOSE, CALIFORNIA 95134
Correspondence name and address
MORRISON & FOERSTER LLP
GARY E. CANN
425 MARKET STREET
SAN FRANCISCO, CALIFORNIA 94105-2482

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