Patent Assignment Details
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| Reel/Frame: | 008585/0138 | |
| Pages: | 3 |
| | Recorded: | 06/04/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/04/2000
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Application #:
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08869200
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Filing Dt:
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06/04/1997
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Title:
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METHOD AND APPARATUS FOR FORMING THIN FILMS USING DUAL ECR PLASMA GENERATERS
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Assignee
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| NAKAGYO-KU |
| 1 NISHINOKYO-KUWABARACHO |
| KYOTO 604, JAPAN |
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Correspondence name and address
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MAJESTIC, PARSONS, SIEBERT & HSUE
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KEIICHI NISHIMURA
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FOUR EMBARCADERO CENTER, STE. 1100
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SAN FRANCISCO, CA 94111-4106
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