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Total properties:
26
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07729836
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Filing Dt:
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07/12/1991
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Title:
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VERTICAL WAFER HEAT TREATMENT APPARATUS HAVING DUAL LOAD LOCK CHAMBERS
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07835754
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Filing Dt:
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02/13/1992
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Title:
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VERTICAL TYPE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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06/15/1993
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Application #:
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07911479
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Filing Dt:
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07/10/1992
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Title:
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CLEAN AIR APPARATUS
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Patent #:
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Issue Dt:
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04/25/1995
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Application #:
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08061290
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Filing Dt:
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05/14/1993
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Title:
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SUBSTRATE TRANSFER METHOD
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Patent #:
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Issue Dt:
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03/22/1994
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Application #:
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08082458
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Filing Dt:
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06/25/1993
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Title:
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METHOD OF HEAT TREATING SEMICONDUCTOR WAFERS BY VARYING THE PRESSURE AND TEMPERATURE
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Patent #:
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Issue Dt:
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06/28/1994
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Application #:
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08107002
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Filing Dt:
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08/17/1993
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Title:
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SYSTEM AND METHOD FOR SUPPORTING AND ROTATING SUBSTRATES IN A PROCESS CHAMBER
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Patent #:
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Issue Dt:
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11/21/1995
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Application #:
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08131391
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Filing Dt:
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10/05/1993
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Title:
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WAFER CONTAINER AND WAFER ALIGNING APPARATUS
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Patent #:
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Issue Dt:
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09/03/1996
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Application #:
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08178547
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Filing Dt:
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01/07/1994
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Title:
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METHOD AND APPARATUS FOR DETERMINING WITH HIGH RESOLUTION THE FIDELITY OF INFORMATION RECEIVED ON A COMMUNICATIONS CHANNEL
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Patent #:
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Issue Dt:
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09/05/1995
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Application #:
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08184055
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Filing Dt:
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01/21/1994
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Title:
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VERTICAL TYPE HEAT TREATMENT SYSTEM
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Patent #:
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Issue Dt:
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10/24/1995
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Application #:
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08191603
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Filing Dt:
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02/04/1994
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Title:
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AIR CLEANING APPARATUS
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Patent #:
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Issue Dt:
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07/30/1996
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Application #:
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08197283
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Filing Dt:
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02/16/1994
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Title:
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TRANSFER DEVICE
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Patent #:
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Issue Dt:
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05/16/1995
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Application #:
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08197873
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Filing Dt:
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02/17/1994
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Title:
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DECOMPRESSION APPARATUS
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Patent #:
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Issue Dt:
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10/31/1995
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Application #:
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08213096
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Filing Dt:
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03/15/1994
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Title:
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PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/02/1996
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Application #:
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08214109
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Filing Dt:
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03/17/1994
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Title:
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FILM FORMING METHOD WHEREIN A PARTIAL PRESSURE OF A REACTON BYPRODUCT IN A PROCESSING CONTAINER IS REDUCED TEMPORARILY
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Patent #:
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Issue Dt:
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08/15/1995
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Application #:
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08222589
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Filing Dt:
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04/04/1994
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Title:
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PROCESSING APPARATUS USING GAS
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Patent #:
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Issue Dt:
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05/07/1996
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Application #:
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08226853
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Filing Dt:
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04/13/1994
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Title:
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AIR CLEANING APPARATUS
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Patent #:
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Issue Dt:
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04/01/1997
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Application #:
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08259180
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Filing Dt:
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06/13/1994
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Title:
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METHOD AND APPARATUS FOR CONTROLLING TEMPERATURE IN RAPID HEAT TREATMENT SYSTEM
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|
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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08303747
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Filing Dt:
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09/09/1994
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Title:
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TEMPERATURE CONTROL METHOD AND APPARATUS FOR USE IN THERMAL PROCESSING EQUIPMENT
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Patent #:
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Issue Dt:
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09/17/1996
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Application #:
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08317653
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Filing Dt:
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09/30/1994
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Title:
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HEAT TREATMENT APPARATUS
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|
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Patent #:
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Issue Dt:
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10/08/1996
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Application #:
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08317751
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Filing Dt:
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10/04/1994
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Title:
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DEVICE FOR TRANSFERRING PLATE-LIKE OBJECTS
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Patent #:
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Issue Dt:
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12/24/1996
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Application #:
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08452505
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Filing Dt:
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05/30/1995
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Title:
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HEAT TREATMENT APPARATUS AND HEAT TREATMENT
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|
|
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Patent #:
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Issue Dt:
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07/08/1997
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Application #:
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08455662
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Filing Dt:
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05/31/1995
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Title:
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SUBSTRATE TRANSFER APPARATUS, AND METHOD OF TRANSFERRING SUBSTRATES
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|
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Patent #:
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|
Issue Dt:
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05/06/1997
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Application #:
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08508242
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Filing Dt:
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07/27/1995
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Title:
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TRANSFER DEVICE
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Patent #:
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|
Issue Dt:
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03/18/1997
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Application #:
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08517286
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Filing Dt:
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08/21/1995
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Title:
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SEMICONDUCTOR PROCESSING APPARATUS AND CLEANING METHOD THEREOF
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|
|
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Patent #:
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Issue Dt:
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10/14/1997
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Application #:
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08600146
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Filing Dt:
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02/12/1996
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Title:
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METHOD FOR FORMING SILICON FILM
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|
|
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Patent #:
|
|
Issue Dt:
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06/09/1998
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Application #:
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08607189
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Filing Dt:
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02/26/1996
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Title:
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HEAT TREATMENT APPARATUS AND METHOD
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