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Total properties:
41
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Patent #:
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Issue Dt:
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06/23/1992
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Application #:
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07538425
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Filing Dt:
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06/15/1990
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Title:
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A HORIZONTAL/VERTICAL CONVERSION HANDLING APPARATUS
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Patent #:
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Issue Dt:
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05/05/1992
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Application #:
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07550981
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Filing Dt:
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07/11/1990
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Title:
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VERTICAL HEAT-TREATMENT APPARATUS HAVING A WAFER TRANSFER MECHANISM
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Patent #:
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Issue Dt:
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07/09/1991
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Application #:
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07555645
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Filing Dt:
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07/23/1990
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Title:
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SUBSTRATE TRANSFER DEVICE
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Patent #:
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Issue Dt:
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09/17/1991
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Application #:
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07564318
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Filing Dt:
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08/08/1990
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Title:
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VERTICAL HEAT-TREATMENT APPARATUS HAVING BOAT TRANSFER MECHANISM
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Patent #:
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Issue Dt:
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11/17/1992
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Application #:
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07605377
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Filing Dt:
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10/30/1990
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Title:
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VERTICAL HEAT-TREATING APPARATUS
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Patent #:
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Issue Dt:
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02/18/1992
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Application #:
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07644565
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Filing Dt:
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01/23/1991
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Title:
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HEAT-TREATMENT APPARATUS HAVING EXHAUST SYSTEM
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Patent #:
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Issue Dt:
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10/08/1991
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Application #:
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07661103
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Filing Dt:
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02/26/1991
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Title:
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METHOD OF LOADING AND UNLOADING WAFER BOAT
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Patent #:
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Issue Dt:
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02/02/1993
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Application #:
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07672852
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Filing Dt:
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03/20/1991
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Title:
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WAFER COUNTER HAVING DEVICE FOR ALIGNING WAFERS
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Patent #:
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Issue Dt:
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01/18/1994
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Application #:
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07674884
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Filing Dt:
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03/26/1991
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Title:
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VERTICAL TYPE DIFFUSION APPARUS
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Patent #:
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Issue Dt:
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07/07/1992
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Application #:
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07693728
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Filing Dt:
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04/30/1991
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Title:
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HEATING APPARATUS
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Patent #:
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Issue Dt:
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01/12/1993
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Application #:
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07723382
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Filing Dt:
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06/28/1991
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Title:
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VERTICAL HEAT-TREATING APPARATUS
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07729836
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Filing Dt:
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07/12/1991
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Title:
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VERTICAL WAFER HEAT TREATMENT APPARATUS HAVING DUAL LOAD LOCK CHAMBERS
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Patent #:
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Issue Dt:
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06/22/1993
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Application #:
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07734784
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Filing Dt:
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07/23/1991
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Title:
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VERTICAL HEAT TREATMENT APPARATUS
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Patent #:
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Issue Dt:
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04/20/1993
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Application #:
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07736647
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Filing Dt:
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07/26/1991
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Title:
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CARRIER CONVEYING APPARATUS
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Patent #:
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Issue Dt:
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02/08/1994
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Application #:
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07740136
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Filing Dt:
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08/05/1991
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Title:
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STOCK UNIT FOR STORING CARRIERS
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|
|
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Patent #:
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Issue Dt:
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07/13/1993
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Application #:
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07760919
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Filing Dt:
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09/17/1991
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Title:
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HEAT-TREATING APPARATUS WITH BATCH SCHEME HAVING IMPROVED HEAT CONTROLLING CAPABILITY
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Patent #:
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Issue Dt:
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08/10/1993
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Application #:
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07765524
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Filing Dt:
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09/25/1991
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Title:
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VERTICAL HEAT-TREATING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
08/17/1993
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Application #:
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07765890
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Filing Dt:
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09/26/1991
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|
Title:
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VERTICAL HEAT TREATING APPARATUS
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Patent #:
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|
Issue Dt:
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11/16/1993
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Application #:
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07766205
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Filing Dt:
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09/27/1991
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Title:
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VERTICAL HEAT TREATING APPARATUS
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|
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Patent #:
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|
Issue Dt:
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12/15/1992
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Application #:
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07766222
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Filing Dt:
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09/27/1991
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Title:
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HEAT TREATING FURNANCE
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Patent #:
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Issue Dt:
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01/26/1993
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Application #:
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07772836
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Filing Dt:
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10/08/1991
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Title:
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APPARATUS FOR PROCESSING SEMICONDUCTORS
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|
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Patent #:
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Issue Dt:
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06/28/1994
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Application #:
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07779254
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Filing Dt:
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10/18/1991
|
|
Title:
|
HEAT TREATMENT APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/28/1993
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Application #:
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07785506
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Filing Dt:
|
10/30/1991
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Title:
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PLATE-LIKE MEMBER CONVEYING APPARATUS
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|
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Patent #:
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Issue Dt:
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11/10/1992
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Application #:
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07789820
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Filing Dt:
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11/12/1991
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Title:
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VERTICAL HEAT TREATMENT APPARATUS HAVING WAFER TRANSFER MECHANISM AND METHOD FOR TRANSFERRING WAFERS
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|
|
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Patent #:
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|
Issue Dt:
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02/16/1993
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Application #:
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07791134
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Filing Dt:
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11/13/1991
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Title:
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HEAT PROCESSING APPARATUS UTILIZING A PLURALITY OF STACKED HEATER HOLDERS
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|
|
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Patent #:
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|
Issue Dt:
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04/27/1993
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Application #:
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07794943
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Filing Dt:
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11/20/1991
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Title:
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SUBSTRATE DETECTING SYSTEM WITH EDGE DETECTION, SUCH AS WAFER OR BASE MATERIAL OF SEMICONDUCTOR DEVICE OR LCD
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|
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Patent #:
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Issue Dt:
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05/04/1993
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Application #:
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07824094
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Filing Dt:
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01/22/1992
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Title:
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HEAT PROCESSING APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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08/10/1993
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Application #:
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07825422
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Filing Dt:
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01/24/1992
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Title:
|
OXIDATION METHOD
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|
|
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Patent #:
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Issue Dt:
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05/04/1993
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Application #:
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07831940
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Filing Dt:
|
02/06/1992
|
|
Title:
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HEAT PROCESSING APPARATUS OF VERTICAL TYPE
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|
|
|
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07835754
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Filing Dt:
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02/13/1992
|
|
Title:
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VERTICAL TYPE PROCESSING APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
07/20/1993
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Application #:
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07842984
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Filing Dt:
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02/28/1992
|
|
Title:
|
HEATING APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/11/1994
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Application #:
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07847303
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Filing Dt:
|
03/06/1992
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|
Title:
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WAFERS TRANSFERRING METHOD IN VERTICAL TYPE HEAT TREATMENT APPARATUS AND THE VERTICAL TYPE HEAT TREATMENT APPARATUS PROVIDED WITH A WAFERS TRANSFERRING SYSTEM
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|
|
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Patent #:
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|
Issue Dt:
|
08/17/1993
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Application #:
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07872106
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Filing Dt:
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04/22/1992
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Title:
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ARM APPARATUS FOR CONVEYING SEMICONDUCTOR WAFER AND PROCESSING SYSTEM USING SAME
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|
|
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Patent #:
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|
Issue Dt:
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01/04/1994
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Application #:
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07907545
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Filing Dt:
|
07/02/1992
|
|
Title:
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WAFER TRANSFER DEVICE
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|
|
|
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Patent #:
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Issue Dt:
|
06/15/1993
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Application #:
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07911479
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Filing Dt:
|
07/10/1992
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Title:
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CLEAN AIR APPARATUS
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|
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Patent #:
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Issue Dt:
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12/28/1993
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Application #:
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07928096
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Filing Dt:
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08/13/1992
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|
Title:
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VERTICAL HEAT TREATMENT APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
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11/16/1993
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Application #:
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08023394
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Filing Dt:
|
02/26/1993
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|
Title:
|
CLEAN AIR APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
06/13/1995
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Application #:
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08056918
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Filing Dt:
|
05/05/1993
|
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Title:
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PLATE-LIKE MEMBER CONVEYING APPARATUS
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|
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Patent #:
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Issue Dt:
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04/25/1995
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Application #:
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08061290
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Filing Dt:
|
05/14/1993
|
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Title:
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SUBSTRATE TRANSFER METHOD
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/10/1995
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Application #:
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08126882
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Filing Dt:
|
09/27/1993
|
|
Title:
|
WAFER TRANSFER DEVICE
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|
|
|
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Patent #:
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|
Issue Dt:
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08/29/1995
|
Application #:
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08263216
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Filing Dt:
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06/17/1994
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Title:
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SUBSTRATE TRANSFERRING APPARATUS
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