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Total properties:
56
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Patent #:
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Issue Dt:
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10/22/1985
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Application #:
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06497466
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Filing Dt:
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05/23/1983
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Title:
|
HARDENING OF PHOTORESIST
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Patent #:
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Issue Dt:
|
02/14/1995
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Application #:
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08013366
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Filing Dt:
|
02/04/1993
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Title:
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VERTICAL HEAT-TREATING APPARATUS AND HEAT-TREATING PROCESS BY USING THE VERTICAL HEAT-TREATING APPARATUS
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|
|
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Patent #:
|
|
Issue Dt:
|
07/12/1994
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Application #:
|
08044463
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Filing Dt:
|
04/09/1993
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Title:
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THERMAL TREATMENT APPARATUS UTILIZING HEATED LID
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|
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Patent #:
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|
Issue Dt:
|
08/29/1995
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Application #:
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08051945
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Filing Dt:
|
04/26/1993
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Title:
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COMBUSTION DEVICE
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Patent #:
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Issue Dt:
|
04/11/1995
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Application #:
|
08062611
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Filing Dt:
|
05/18/1993
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Title:
|
CONVEYOR APPARATUS
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Patent #:
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Issue Dt:
|
08/02/1994
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Application #:
|
08066416
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Filing Dt:
|
05/25/1993
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|
Title:
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TREATMENT OBJECT SUPPORTING DEVICE
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|
|
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Patent #:
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|
Issue Dt:
|
07/09/1996
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Application #:
|
08068703
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Filing Dt:
|
05/28/1993
|
|
Title:
|
THERMAL PROCESSING APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/1994
|
Application #:
|
08075119
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Filing Dt:
|
06/10/1993
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|
Title:
|
HEAT TREATMENT APPARATUS
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|
|
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Patent #:
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|
Issue Dt:
|
11/08/1994
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Application #:
|
08079386
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Filing Dt:
|
06/21/1993
|
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Title:
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PIPING CONNECTION DEVICE
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|
|
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Patent #:
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|
Issue Dt:
|
10/04/1994
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Application #:
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08084984
|
Filing Dt:
|
07/02/1993
|
|
Title:
|
METHOD FOR CONTROLLING PLASMA SURFACE-TREATMENTS WITH A PLURALITY OF PHOTODETECTORS AND OPTICAL FILTERS
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/03/1995
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Application #:
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08089827
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Filing Dt:
|
07/12/1993
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|
Title:
|
TREATMENT SYSTEM AND TREATMENT APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
10/25/1994
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Application #:
|
08096893
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Filing Dt:
|
07/26/1993
|
|
Title:
|
HEAT-TREATING APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
10/18/1994
|
Application #:
|
08103666
|
Filing Dt:
|
08/10/1993
|
|
Title:
|
WAFER BOAT ROTATING APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
10/17/1995
|
Application #:
|
08104651
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Filing Dt:
|
08/11/1993
|
|
Title:
|
VERTICAL HEAT TREATMENT APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/11/1994
|
Application #:
|
08109430
|
Filing Dt:
|
08/20/1993
|
|
Title:
|
SUBSTRATE DETECTING DEVICE FOR DETECTING THE PRESENCE OF A TRANSPARENT AND/OR AN OPAQUE SUBSTRATE BY OUTPUT OF JUDGEMENT MEANS
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/24/1995
|
Application #:
|
08130441
|
Filing Dt:
|
10/01/1993
|
|
Title:
|
SUBSTRATE HANDLING APPARATUS
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|
|
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|
Patent #:
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|
Issue Dt:
|
07/30/1996
|
Application #:
|
08135481
|
Filing Dt:
|
10/13/1993
|
|
Title:
|
HEAT TREATING APPARATUS HAVING HEAT TRANSMISSION-PREVENTING PLATES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/1995
|
Application #:
|
08155750
|
Filing Dt:
|
11/23/1993
|
|
Title:
|
TRAP DEVICE FOR VAPOR PHASE REACTION APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/18/1995
|
Application #:
|
08157280
|
Filing Dt:
|
11/26/1993
|
|
Title:
|
VERTICAL HEAT TREATING DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/1995
|
Application #:
|
08163799
|
Filing Dt:
|
12/09/1993
|
|
Title:
|
A METHOD FOR CLEANING HEAT TREATMENT PROCESSING APPARATUS
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
06/06/1995
|
Application #:
|
08170754
|
Filing Dt:
|
12/21/1993
|
|
Title:
|
VERTICAL HEAT TREATING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/1995
|
Application #:
|
08179708
|
Filing Dt:
|
01/11/1994
|
|
Title:
|
VERTICAL TREATING APPARATUS HAVING A RESTRICTING MEANS FOR AVOIDING MISALIGNMENT
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/07/1995
|
Application #:
|
08191487
|
Filing Dt:
|
02/04/1994
|
|
Title:
|
HEAT TREATING APPARATUS
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
03/19/1996
|
Application #:
|
08202457
|
Filing Dt:
|
02/28/1994
|
|
Title:
|
HEAT TREATMENT PROCESS FOR WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/1996
|
Application #:
|
08203922
|
Filing Dt:
|
03/01/1994
|
|
Title:
|
THERMAL PROCESSING APPARATUS WITH HEAT SHIELDING MEMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/18/1996
|
Application #:
|
08212884
|
Filing Dt:
|
03/14/1994
|
|
Title:
|
TREATMENT SYSTEM INCLUDING A PLURALITY OF TREATMENT APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/1995
|
Application #:
|
08225618
|
Filing Dt:
|
04/11/1994
|
|
Title:
|
VERTICAL HEAT TREATMENT APPARATUS WITH A ROTARY HOLDER TURNING INDEPENDENTLY OF A LINER PLATE
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
08/29/1995
|
Application #:
|
08250379
|
Filing Dt:
|
05/27/1994
|
|
Title:
|
HEAT TREATING METHOD AND DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/1995
|
Application #:
|
08258066
|
Filing Dt:
|
06/10/1994
|
|
Title:
|
HEAT TREATING DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/05/1996
|
Application #:
|
08262057
|
Filing Dt:
|
06/17/1994
|
|
Title:
|
HEAT TREATMENT METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/16/1996
|
Application #:
|
08266767
|
Filing Dt:
|
06/28/1994
|
|
Title:
|
HEAT TREATMENT APPARATUS AND METHOD THEREOF
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/16/1996
|
Application #:
|
08269039
|
Filing Dt:
|
06/30/1994
|
|
Title:
|
THERMAL PROCESSING METHOD AND APPARATUS THEREFOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/26/1996
|
Application #:
|
08269608
|
Filing Dt:
|
07/05/1994
|
|
Title:
|
APPARATUS FOR HEAT TREATING SEMICONDUCTORS AT NORMAL PRESSURE AND LOW PRESSURE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/1997
|
Application #:
|
08276848
|
Filing Dt:
|
07/18/1994
|
|
Title:
|
HEAT TREATMENT APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/22/1997
|
Application #:
|
08280855
|
Filing Dt:
|
07/26/1994
|
|
Title:
|
HEAT TREATING APPARATUS HAVING A TEMPERATURE DETECTING SENSOR
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|
|
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|
Patent #:
|
|
Issue Dt:
|
06/17/1997
|
Application #:
|
08316333
|
Filing Dt:
|
09/30/1994
|
|
Title:
|
TREATMENT SYSTEM AND TREATMENT APPARATUS
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|
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|
|
Patent #:
|
|
Issue Dt:
|
04/09/1996
|
Application #:
|
08337366
|
Filing Dt:
|
11/08/1994
|
|
Title:
|
THERMAL PROCESSING FURNACE AND FABRICATION METHOD THEREOF
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|
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Patent #:
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|
Issue Dt:
|
07/07/1998
|
Application #:
|
08341052
|
Filing Dt:
|
11/16/1994
|
|
Title:
|
PROCESSING FURNANCE FOR OXIDIZING OBJECTS
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|
|
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|
Patent #:
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|
Issue Dt:
|
09/03/1996
|
Application #:
|
08353288
|
Filing Dt:
|
12/05/1994
|
|
Title:
|
VERTICAL HEAT TREATMENT APPARATUS WITH A CIRCULATION GAS PASSAGE
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|
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|
Patent #:
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|
Issue Dt:
|
09/30/1997
|
Application #:
|
08365460
|
Filing Dt:
|
12/28/1994
|
|
Title:
|
HEAT TREATMENT APPARATUS AND VALVE DEVICE FOR USE IN THE SAME
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Patent #:
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|
Issue Dt:
|
07/08/1997
|
Application #:
|
08409098
|
Filing Dt:
|
03/23/1995
|
|
Title:
|
HEAT TREATMENT METHOD AND DEVICE
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Patent #:
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|
Issue Dt:
|
05/28/1996
|
Application #:
|
08409427
|
Filing Dt:
|
03/24/1995
|
|
Title:
|
DECOMPRESSION CONTAINER
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Patent #:
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|
Issue Dt:
|
09/02/1997
|
Application #:
|
08410538
|
Filing Dt:
|
03/24/1995
|
|
Title:
|
HEAT TREATMENT METHOD AND APPARATUS THEREOF
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|
|
Patent #:
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|
Issue Dt:
|
09/10/1996
|
Application #:
|
08411899
|
Filing Dt:
|
03/28/1995
|
|
Title:
|
HEAT TREATMENT PROCESSING APPARATUS AND CLEANING METHOD THEREOF
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Patent #:
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|
Issue Dt:
|
12/16/1997
|
Application #:
|
08420610
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Filing Dt:
|
04/11/1995
|
|
Title:
|
WAFER PROCESSING APPARATUS
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Patent #:
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|
Issue Dt:
|
01/09/1996
|
Application #:
|
08430478
|
Filing Dt:
|
04/28/1995
|
|
Title:
|
HEAT TREATMENT BOAT SUPPORT
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|
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Patent #:
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|
Issue Dt:
|
01/09/1996
|
Application #:
|
08430482
|
Filing Dt:
|
04/28/1995
|
|
Title:
|
HEAT TREATMENT BOAT
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Patent #:
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|
Issue Dt:
|
11/18/1997
|
Application #:
|
08441048
|
Filing Dt:
|
05/15/1995
|
|
Title:
|
HEAT TREATMENT PROCESS
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|
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|
|
Patent #:
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|
Issue Dt:
|
05/12/1998
|
Application #:
|
08485506
|
Filing Dt:
|
06/07/1995
|
|
Title:
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THERMAL PROCESSING METHOD AND APPARATUS THEREFOR
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|
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|
Patent #:
|
|
Issue Dt:
|
05/12/1998
|
Application #:
|
08489937
|
Filing Dt:
|
06/13/1995
|
|
Title:
|
HEAT TREATMENT APPARATUS
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|
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|
Patent #:
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|
Issue Dt:
|
11/19/1996
|
Application #:
|
08496480
|
Filing Dt:
|
06/29/1995
|
|
Title:
|
VACUUM EXHAUST SYSTEM FOR PROCESSING APPARATUS
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|
|
|
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Patent #:
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|
Issue Dt:
|
10/08/1996
|
Application #:
|
08583669
|
Filing Dt:
|
01/05/1996
|
|
Title:
|
TREATMENT APPARATUS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
12/29/1998
|
Application #:
|
08620535
|
Filing Dt:
|
03/25/1996
|
|
Title:
|
TREATMENT SYSTEM AND TREATMENT APPARATUS WITH MULTI-STAGE CARRIER STORAGE CHAMBERS
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|
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|
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Patent #:
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|
Issue Dt:
|
03/23/1999
|
Application #:
|
08630664
|
Filing Dt:
|
04/10/1996
|
|
Title:
|
THERMAL PROCESSING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/1997
|
Application #:
|
08662027
|
Filing Dt:
|
06/12/1996
|
|
Title:
|
HEAT TREATMENT METHOD USING A VERTICAL PROCESSING TUBE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/1998
|
Application #:
|
08667584
|
Filing Dt:
|
06/24/1996
|
|
Title:
|
TREATMENT APPARATUS
|
|
