Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 008626/0152 | |
| Pages: | 3 |
| | Recorded: | 07/28/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/28/1998
|
Application #:
|
08829683
|
Filing Dt:
|
03/31/1997
|
|
Title:
|
SELECTIVE PLASMA ETCHING OF SILICON NITRIDE IN PRESENCE OF SILICON OR SILICON OXIDES USING MIXTURE OF CH3F OR CH2F2 AND CF4 AND O2
|
|
|
Assignee
|
|
|
|
|
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
|
|
Correspondence name and address
|
| |
APPLIED MATERIALS, INC.
|
| |
MICHAEL L SHERRARD
|
| |
PATENT DEPARTMENT
|
| |
P.O. BOX 450A
|
| |
SANTA CLARA, CA 95052
|
Search Results as of:
05/21/2024 12:32 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
