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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:008669/0516   Pages: 7
Recorded: 08/05/1997
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 42
1
Patent #:
5147493
Issue Dt:
09/15/1992
Application #:
07714231
Filing Dt:
06/12/1991
Title:
PLASMA GENERATING APPARATUS
2
Patent #:
5150797
Issue Dt:
09/29/1992
Application #:
07725518
Filing Dt:
07/03/1991
Title:
IC SORTING AND RECEIVING APPARATUS AND METHOD
3
Patent #:
5151651
Issue Dt:
09/29/1992
Application #:
07728275
Filing Dt:
07/11/1991
Title:
APPARATUS FOR TESTING IC ELEMENTS
4
Patent #:
5374147
Issue Dt:
12/20/1994
Application #:
07942841
Filing Dt:
09/10/1992
Title:
TRANSFER DEVICE FOR TRANSFERRING A SUBSTRATE
5
Patent #:
5275683
Issue Dt:
01/04/1994
Application #:
07965851
Filing Dt:
10/23/1992
Title:
MOUNT FOR SUPPORTING SUBSTRATES AND PLASMA PROCESSING APPARATUS USING THE SAME
6
Patent #:
5368684
Issue Dt:
11/29/1994
Application #:
07993063
Filing Dt:
12/18/1992
Title:
ETCHING METHOD FOR A SILICON-CONTAINING LAYER USING HYDROGEN BROMIDE
7
Patent #:
5306380
Issue Dt:
04/26/1994
Application #:
08053389
Filing Dt:
04/28/1993
Title:
VACUUM PROCESSING APPARATUS
8
Patent #:
5410259
Issue Dt:
04/25/1995
Application #:
08069839
Filing Dt:
06/01/1993
Title:
PROBING DEVICE SETTING A PROBE CARD PARALLEL
9
Patent #:
5404111
Issue Dt:
04/04/1995
Application #:
08077392
Filing Dt:
06/17/1993
Title:
PROBE APPARATUS WITH A SWINGING HOLDER FOR AN OBJECT OF EXAMINATION
10
Patent #:
5509771
Issue Dt:
04/23/1996
Application #:
08102987
Filing Dt:
07/28/1993
Title:
VACUUM PROCESSING APPARATUS
11
Patent #:
5378971
Issue Dt:
01/03/1995
Application #:
08108240
Filing Dt:
08/19/1993
Title:
PROBE AND A METHOD OF MANUFACTURING THE SAME
12
Patent #:
5461327
Issue Dt:
10/24/1995
Application #:
08113741
Filing Dt:
08/31/1993
Title:
PROBE APPARATUS
13
Patent #:
5521522
Issue Dt:
05/28/1996
Application #:
08151367
Filing Dt:
11/12/1993
Title:
PROBE APPARATUS FOR TESTING MULTIPLE INTEGRATED CIRCUIT DIES
14
Patent #:
5521523
Issue Dt:
05/28/1996
Application #:
08165940
Filing Dt:
12/14/1993
Title:
PROBE CARD ASSEMBLY AND METHOD OF MANUFACTURING PROBE CARD ASSEMBLY
15
Patent #:
5382311
Issue Dt:
01/17/1995
Application #:
08168367
Filing Dt:
12/17/1993
Title:
STAGE HAVING ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS USING SAME
16
Patent #:
5558482
Issue Dt:
09/24/1996
Application #:
08202100
Filing Dt:
02/25/1994
Title:
MULTI-CHAMBER SYSTEM
17
Patent #:
5489853
Issue Dt:
02/06/1996
Application #:
08246334
Filing Dt:
05/19/1994
Title:
TESTING APPARATUS AND CONNECTION METHOD FOR THE TESTING APPARATUS
18
Patent #:
5625526
Issue Dt:
04/29/1997
Application #:
08252213
Filing Dt:
06/01/1994
Title:
ELECTROSTATIC CHUCK
19
Patent #:
5565114
Issue Dt:
10/15/1996
Application #:
08294396
Filing Dt:
08/23/1994
Title:
METHOD AND DEVICE FOR DETECTING THE END POINT OF PLASMA PROCESS
20
Patent #:
5539274
Issue Dt:
07/23/1996
Application #:
08301566
Filing Dt:
09/07/1994
Title:
ELECTRON BEAM EXCITED PLASMA SYSTEM
21
Patent #:
5728253
Issue Dt:
03/17/1998
Application #:
08315837
Filing Dt:
09/30/1994
Title:
METHOD AND DEVICES FOR DETECTING THE END POINT OF PLASMA PROCESS
22
Patent #:
5506512
Issue Dt:
04/09/1996
Application #:
08347136
Filing Dt:
11/23/1994
Title:
TRANSFER APPARATUS HAVING AN ELEVATOR AND PROBER USING THE SAME
23
Patent #:
5642056
Issue Dt:
06/24/1997
Application #:
08361537
Filing Dt:
12/22/1994
Title:
PROBE APPARATUS FOR CORRECTING THE PROBE CARD POSTURE BEFORE TESTING
24
Patent #:
5547539
Issue Dt:
08/20/1996
Application #:
08361579
Filing Dt:
12/22/1994
Title:
PLASMA PROCESSING APPARATUS AND METHOD
25
Patent #:
5578164
Issue Dt:
11/26/1996
Application #:
08363270
Filing Dt:
12/23/1994
Title:
PLASMA PROCESSING APPARATUS AND METHOD
26
Patent #:
5560804
Issue Dt:
10/01/1996
Application #:
08380325
Filing Dt:
01/30/1995
Title:
ETCHING METHOD FOR SILICON CONTAINING LAYER
27
Patent #:
5636960
Issue Dt:
06/10/1997
Application #:
08389226
Filing Dt:
02/15/1995
Title:
APPARATUS FOR DETECTING AND ALIGNING A SUBSTRATE
28
Patent #:
5585738
Issue Dt:
12/17/1996
Application #:
08414590
Filing Dt:
03/31/1995
Title:
PROBE SYSTEM HAVING VERTICAL HEIGHT DETECTION AND DOUBLE FOCAL IMAGE PICKUP COINCIDING WITH PROBE CONTACT IN HEIGHT ADJUSTMENT
29
Patent #:
5900103
Issue Dt:
05/04/1999
Application #:
08424127
Filing Dt:
04/19/1995
Title:
PLASMA TREATMENT METHOD AND APPARATUS
30
Patent #:
5568054
Issue Dt:
10/22/1996
Application #:
08444888
Filing Dt:
05/19/1995
Title:
PROBE APPARATUS HAVING BURN-IN TEST FUNCTION
31
Patent #:
5604443
Issue Dt:
02/18/1997
Application #:
08448264
Filing Dt:
05/23/1995
Title:
PROBE TEST APPARATUS
32
Patent #:
6299722
Issue Dt:
10/09/2001
Application #:
08478814
Filing Dt:
06/07/1995
Title:
ETCHING EQUIPMENT INCLUDING A POST PROCESSING APPARTUS FOR REMOVING A RESIST FILM, POLYMER, AND IMPURITY LAYER FROM AN OBJECT
33
Patent #:
5801527
Issue Dt:
09/01/1998
Application #:
08506819
Filing Dt:
07/25/1995
Title:
APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICE
34
Patent #:
5604446
Issue Dt:
02/18/1997
Application #:
08512915
Filing Dt:
08/09/1995
Title:
PROBE APPARATUS
35
Patent #:
5672977
Issue Dt:
09/30/1997
Application #:
08514384
Filing Dt:
08/11/1995
Title:
PROBE APPARATUS
36
Patent #:
5698062
Issue Dt:
12/16/1997
Application #:
08533383
Filing Dt:
09/25/1995
Title:
PLASMA TREATMENT APPARATUS AND METHOD
37
Patent #:
5640100
Issue Dt:
06/17/1997
Application #:
08546164
Filing Dt:
10/20/1995
Title:
PROBE APPARATUS HAVING PROBE CARD EXCHANGING MECHANISM
38
Patent #:
5703494
Issue Dt:
12/30/1997
Application #:
08553013
Filing Dt:
11/03/1995
Title:
PROBING TEST APPARATUS
39
Patent #:
5594357
Issue Dt:
01/14/1997
Application #:
08568284
Filing Dt:
12/06/1995
Title:
TESTING APPARATUS AND CONNECTION METHOD FOR THE TESTING APPARATUS
40
Patent #:
5611655
Issue Dt:
03/18/1997
Application #:
08582805
Filing Dt:
01/04/1996
Title:
VACUUM PROCESS APPARATUS AND VACUUM PROCESSING METHOD
41
Patent #:
5640101
Issue Dt:
06/17/1997
Application #:
08634675
Filing Dt:
04/18/1996
Title:
PROBE SYSTEM AND PROBE METHOD
42
Patent #:
5622593
Issue Dt:
04/22/1997
Application #:
08658557
Filing Dt:
06/05/1996
Title:
PLASMA PROCESSING APPARATUS AND METHOD
Assignor
1
TOKYO ELECTRON YAMANASHI LIMITED
Exec Dt:
02/21/1997
Assignee
1
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME
MINATO-KU, TOKYO 107, JAPAN
Correspondence name and address
OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT
MARVIN J. SPIVAK
1755 JEFFERSON DAVIS HIGHWAY
FOURTH FLOOR
ARLINGTON, VA 22202

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