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Total properties:
23
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Patent #:
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|
Issue Dt:
|
09/10/1996
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Application #:
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08250278
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Filing Dt:
|
05/27/1994
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Title:
|
METHOD AND APPARATUS FOR RESETTING INDIVIDUAL PROCESSES IN A CONTROL SYSTEM
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|
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Patent #:
|
|
Issue Dt:
|
10/22/1996
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Application #:
|
08270043
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Filing Dt:
|
07/01/1994
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Title:
|
SPINDLE ASSEMBLY WITH IMPROVED WAFER HOLDER
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|
|
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Patent #:
|
|
Issue Dt:
|
02/25/1997
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Application #:
|
08275637
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Filing Dt:
|
07/15/1994
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Title:
|
METHOD AND APPARATUS FOR DETECTING SUBSTRATE IN A SUBSTRATE PROCESSING SYSTEM
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|
|
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Patent #:
|
|
Issue Dt:
|
08/20/1996
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Application #:
|
08275797
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Filing Dt:
|
07/15/1994
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Title:
|
SCRUBBER CONTROL SYSTEM
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|
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Patent #:
|
|
Issue Dt:
|
01/14/1997
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Application #:
|
08321085
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Filing Dt:
|
10/11/1994
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Title:
|
WAFER POLISHING MACHINE WITH FLUID BEARINGS AND DRIVE SYSTEMS
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|
|
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Patent #:
|
|
Issue Dt:
|
11/05/1996
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Application #:
|
08321086
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Filing Dt:
|
10/11/1994
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Title:
|
WAFER HOLDER FOR SEMICONDUCTOR WAFER POLISHING MACHINE
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|
|
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Patent #:
|
|
Issue Dt:
|
11/19/1996
|
Application #:
|
08321169
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Filing Dt:
|
10/11/1994
|
|
Title:
|
POLISHING PAD CLUSTER FOR POLISHING A SEMICONDUCTOR WAFER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/24/1996
|
Application #:
|
08333463
|
Filing Dt:
|
11/02/1994
|
|
Title:
|
WAFER POLISHING MACHINE WITH FLUID BEARINGS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/02/1997
|
Application #:
|
08555164
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Filing Dt:
|
11/08/1995
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|
Title:
|
PROCESS FOR BRUSH CLEANING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/14/2001
|
Application #:
|
08615520
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Filing Dt:
|
03/11/1996
|
|
Title:
|
METHOD TO REMOVE METALS IN A SCRUBBER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/03/1998
|
Application #:
|
08617434
|
Filing Dt:
|
03/18/1996
|
|
Title:
|
DRIP CHEMICAL DELIVARY METHOD AND APPARATUS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/19/1999
|
Application #:
|
08640459
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Filing Dt:
|
05/01/1996
|
|
Title:
|
METHOD AND APPARTUS FOR CLEANING EDGES OF CONTAMINATED SUBSTRATES
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/22/1998
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Application #:
|
08670648
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Filing Dt:
|
06/26/1996
|
|
Title:
|
WAFER HOLDER WITH SPINDLE ASSEMBLY AND WAFER HOLDER ACTUATOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/1999
|
Application #:
|
08687977
|
Filing Dt:
|
07/29/1996
|
|
Title:
|
SCRUBBER CONTROL SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/05/1998
|
Application #:
|
08688062
|
Filing Dt:
|
07/29/1996
|
|
Title:
|
SUBSTRATE PROCESSING SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/1999
|
Application #:
|
08691450
|
Filing Dt:
|
08/01/1996
|
|
Title:
|
HESITATION FREE ROLLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/24/1998
|
Application #:
|
08692594
|
Filing Dt:
|
08/06/1996
|
|
Title:
|
HESITATION FREE ROLLER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/18/1998
|
Application #:
|
08705115
|
Filing Dt:
|
08/29/1996
|
|
Title:
|
CONTAINMENT APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/20/1999
|
Application #:
|
08705161
|
Filing Dt:
|
08/29/1996
|
|
Title:
|
BRUSH ASSEMBLY APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/1998
|
Application #:
|
08705162
|
Filing Dt:
|
08/29/1996
|
|
Title:
|
ROLLER POSITIONING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/26/1999
|
Application #:
|
08705337
|
Filing Dt:
|
08/29/1996
|
|
Title:
|
ROLLER WITH TREADING AND SYSTEM INCLUDING THE SAME
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/02/1997
|
Application #:
|
08759172
|
Filing Dt:
|
12/03/1996
|
|
Title:
|
LINEAR POLISHER AND METHOD FOR SEMICONDUCTOR WAFER PLANARIZATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/09/1998
|
Application #:
|
08770913
|
Filing Dt:
|
12/20/1996
|
|
Title:
|
MEGASONIC BATH
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|
