Patent Assignment Details
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| Reel/Frame: | 008726/0203 | |
| Pages: | 3 |
| | Recorded: | 07/15/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/15/1998
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Application #:
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08892976
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Filing Dt:
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07/15/1997
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Title:
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CHARGED PARTICLE BEAM EXPOSURE METHOD AND CHARGED PARTICLE BEAM EXPOSURE APPARATUS
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Assignee
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| 1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU, KAWASAKI-SHI |
| KANAGAWA, 211, JAPAN |
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Correspondence name and address
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ARMSTRONG, WESTERMAN, HATTORI, ET AL.
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WILLIAM F. WESTERMAN
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1725 K STREET, N.W.
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SUITE 1000
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WASHINGTON, D.C. 20006
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