Patent Assignment Details
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| Reel/Frame: | 008756/0429 | |
| Pages: | 3 |
| | Recorded: | 10/20/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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08839111
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Filing Dt:
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04/23/1997
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Title:
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APPARATUS FOR IMPROVED REMOTE MICROWAVE PLASMA SOURCE FOR USE WITH SUBSTRATE PROCESSING SYSTEMS
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Assignee
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| 3050 BOWERS AVENUE |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROSA S. KIM, PATENT CONSEL
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LEGAL AFFAIRS DEPARTMENT
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P.O. BOX 450A
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SANTA CLARA, CA 95052
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